Universal 3D-Printing of Suspended Metal Oxide Nanowire Arrays on MEMS for AI-Optimized Combinatorial Gas Fingerprinting.

Journal: Advanced science (Weinheim, Baden-Wurttemberg, Germany)
Published Date: Aug 26, 2025

Abstract

Additive manufacturing technology has the potential to provide great versatility in the design and fabrication of sensing devices. This prerequisite necessitates further technological improvement in precision and material diversity. Here, a universal meniscus-guided 3D printing method is reported that can fabricate freestanding metal oxide semiconducting nanowires with programmed compositions and compatible substrate options at the single-entity level. By studying printing process and ink compositions, polycrystalline metal oxide (MOX) nanowires with controlled shapes and tunable diameters down to 180 nm are achieved. The method enables a high-precision, mask-free printing of MOXs nanowire arches array on a 1.5 µm thick suspended membrane, paving the way for integrating a micro-electromechanical systems (MEMS) chemiresistive gas sensor. The diversity of 3D printable materials demonstrated in this study covers 24 types of combination MOX nanowires, including TiO, ZnO, SnO, InO, WO, and CeO, doped with noble metals of Au, Ag, Pd, and Pt. Their sensing performances for CH, NH, CHCHOH, CO, and HS gases are quantitatively investigated, while artificial intelligence (AI)-driven analysis of multi-sensor responses achieves 98% gas classification accuracy via sliding time window-based convolutional neural networks (CNN). The ability to 3D print semiconducting materials opens the possibility to freely design and realize new-concept electronic devices beyond the restrictions of the traditional top-down manufacturing process.

Authors

  • Yu Liu
    Research Center of Information Technology, Beijing Academy of Agriculture and Forestry Science, Beijing, China.
  • Kichul Lee
    Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea.
  • Hongjun Liu
    Department of Spinal Surgery, Huai'an 82 hospital, Huai'an, Jiangsu, 223001, People's Republic of China.
  • Chenwei Li
    Shanghai United Imaging Healthcare, Shanghai 201807, People's Republic of China.
  • Xiaoyi Zeng
    The Greater Bay Area University Joint Laboratory of Micro- and Nanofabrication, Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen, 518055, China.
  • Rongyue Liu
    The Greater Bay Area University Joint Laboratory of Micro- and Nanofabrication, Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen, 518055, China.
  • Yulong Chen
    Department of Lung Cancer, Tianjin Medical University Cancer Institute and Hospital, National Clinical Research Center for Cancer, Key Laboratory of Cancer Prevention and Therapy, Tianjin's Clinical Research Center for Cancer, Tianjin Lung Cancer Center, 
Tianjin Cancer Hospital Airport Hospital National Clinical Research Center for Cancer, Tianjin 300060, China.
  • Zijun Chen
    The Second Clinical School of Southern Medical University, Guangzhou.
  • Jihyuk Yang
    Department of Mechanical Engineering, The University of Hong Kong, Pokfulam Road, Hong Kong, 999077, China.
  • Xiao Huan
    Department of Mechanical Engineering, The University of Hong Kong, Pokfulam Road, Hong Kong, 999077, China.
  • Inkyu Park
    Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea.
  • Ji Tae Kim
    Department of Mechanical Engineering, The University of Hong Kong, Pokfulam Road, Hong Kong, 999077, China.
  • Xing Cheng
    Health Management Center.

Keywords

No keywords available for this article.

External Resources

Popular Topics
Recent Journals