Fabrication of NbC/GaN Nanofilm Sensor via Photolithography and its Investigation as a Sensor for Trimethylamine Mixed Gas Detection Using Dual-Feature Extraction and Deep Learning.

Journal: ACS sensors
Published Date: Jan 16, 2026

Abstract

In this study, we successfully synthesized NbC nanofilms on the GaN surface, and a more uniform size and thinner thickness of NbC were optimized by further fabricating circular hole arrays on GaN epitaxial wafers using photolithography and etching techniques. This sensor exhibits an ultralow detection limit of 200 ppb for TMA gas at room temperature, a high response value (84.14%) to 200 ppm of TMA, and low resistance fluctuation for uniform NbC nanofilms. The excellent performance after combination of the two can be attributed to the synergistic effects of p-n heterojunctions and Schottky barriers. Furthermore, the algorithm innovatively adopts dual-feature extraction via KPCA combined with polynomial feature engineering to systematically investigate the relationship within sensor array data. By integrating machine learning algorithms with the sensor array, the system achieves the precise identification of target components in gas mixtures, reaching 98% accuracy. Ultimately, this study demonstrates the significant application potential of gas sensors in the next generation robotic electronic nose.

Authors

  • Juxu Guang
    Shanxi Key Laboratory of Micro Nano Sensors & Artificial Intelligence Perception, College of Integrated Circuits, Taiyuan University of Technology, Taiyuan 030024, China.
  • Dan Han
    College of Life Science and Bio-engineering, Beijing University of Technology, Beijing, 100124, China.
  • Yilin Ping
    Shanxi Medical University School and Hospital of Stomatology, Taiyuan 030001 Shanxi, China.
  • Lianao Yan
    Shanxi Key Laboratory of Micro Nano Sensors & Artificial Intelligence Perception, College of Integrated Circuits, Taiyuan University of Technology, Taiyuan 030024, China.
  • Zhengyang Jia
    Shanxi Key Laboratory of Micro Nano Sensors & Artificial Intelligence Perception, College of Integrated Circuits, Taiyuan University of Technology, Taiyuan 030024, China.
  • Yuxuan Wang
    Department of Maxillofacial and Otorhinolaryngology Oncology, Tianjin's Clinical Research Center for Cancer, National Clinical Research Center for Cancer, Tianjin Medical University Cancer Institute and Hospital, Tianjin Medical University, Tianjin, China.
  • Zhitao Cheng
  • Guojing Wang
    Medical Innovation Research Division, Chinese PLA General Hospital, Beijing 100853, China.
  • Weidong Wang
    Zhejiang Huade New Materials Co., Ltd., Zhejiang Province, Hangzhou, China.
  • Shengbo Sang
    Shanxi Key Laboratory of Micro Nano Sensors & Artificial Intelligence Perception, College of Information and Computer, Taiyuan University of Technology, Taiyuan 030024, China.

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