Recent Progress of Soft Electrothermal Actuators.

Journal: Soft robotics
Published Date: Jul 13, 2020

Abstract

Developing soft electrothermal actuators (ETAs) has drawn extensive concern in recent years. This article presents a comprehensive review on recent progress of soft ETAs through five sections: device design on structure and materials, property, fabrication methods, applications, and prospects. It's found that the fabrication process can be divided into standard surface complementary metal oxide semiconductor technology, novel laser scribing, and inkjet printing method. Moreover, current applications involve three aspects: mechanical applications, optical applications, and biomimetic applications. It will develop in the direction of increasing electrothermal efficiency and response speed emphatically. This review encourages achievement of its higher performance and broad applications in the future.

Authors

  • Ye Tian
    State Key Laboratory of Molecular Vaccinology and Molecular Diagnostics and Center for Molecular Imaging and Translational Medicine, School of Public Health, Xiamen University, Xiamen, 361102, China.
  • Yu-Tao Li
    Institute of Microelectronics, Tsinghua University, Beijing, China.
  • He Tian
    Institute of Microelectronics and Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China.
  • Yi Yang
    Department of Orthopedics, Orthopedic Research Institute, West China Hospital, Sichuan University, Chengdu, Sichuan, China.
  • Tian-Ling Ren
    Institute of Microelectronics and Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China.

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